Products Semiconductor / Diamond Substrates
Single Crystal Substrates
FWHM of X-ray locking curve can be selected. (ex. FWHM＜50arcsec, FWHM＜30arcsec)
- *Joint from 2 to 9 single-crystal substrates that each size is 10 x 10mm.
- *Orientation is (100).
- * Size: ＜30x30mm, Thickness 0.03~3mm
Epi-layer on Substrates
1. B-doped epitaxial layer
- B concentration:
- 1500cm2/Vs or more
2. High quality epitaxial layer
- N concentration:
- Can be done for Mosaic substrates Can be polished when thickness is more than 30 µm
We will offer various substrates for each customer inquiry.
Details of necessary specification will be required for your inquiries.
|Model Number||Size (mm)||Remarks|
|RH333Pf2||3×3×0.3||Substrate with the off angle of 2°|
|RH555PP||5×5×0.5||Both faces regular polishing|
|RH333KPP||3×3×0.3||(111) Orientation, both faces regular polishing|
|RH25255PV||25×25×0.5||Mosaic substrate, one face regular polishing|
Please feel free to contact us about EDP
technology and products.